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Master's programme

Master of Science in Micro- and Nanotechnologies Technische Universität Ilmenau

Duration
4 semesters
Language of instruction
English
Tuition fees
No tuition fees
Next application deadline
View details
Language level required
English: C1
German: None

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Master of Science in Micro- and Nanotechnologies
© TU Ilmenau possesses the right to publish this video. Copyright Bellmannmedia

Master of Science in Micro- and Nanotechnologies

Film production of Bellmannmedia shows a testimonial of a Micro- and Nanotechnologies Master's student, the facilities, and the studying atmosphere on the campus of TU Ilmenau.

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Programme overview

Quick facts

Degree
MSc
Duration
4 semesters
Intake
Winter semester
Joint degree / double degree programme
No
A Diploma supplement will be issued
Yes
Combined Master's degree / PhD programme
No

Language of instruction

English

The main teaching language is English. Some elective subjects may be offered in German.

A German language course is compulsory (part of the curriculum) for students who do not have any German language proficiency.

Programme description

Studying microtechnologies and nanotechnologies at the TU Ilmenau offers a combination of classical microtechnologies and modern nanotechnologies. It covers methods, tools, and theoretical considerations for research and development in the world of microscale and nanoscale structures.
The aim of this engineering science-oriented interdisciplinary Master's programme is to teach the scientific fundamentals and basic technical knowledge about microstructure and nanostructure generation as well as their systemic integration in systems. Students acquire skills to contribute and drive future developments in microtechnologies and nanotechnologies as well as nanotechnical applications.
Particular attention is devoted to teaching the relevant methodological variety of lithographic nanostructuring techniques (top-down strategy), the molecular structuring through self-assembly (bottom-up approach), the opportunity of combining both concepts, and the required characterisation techniques.
The programme comprises the following foci:

  • Nanotechnology, nanoelectronics, and nanosensors
  • Materials for microtechnologies and nanotechnologies
  • Technologies of microstructuring and nanostructuring
  • Structure and material characterisation
  • Semiconductors
  • Microsystems technology / system integration
  • Microelectronic packaging and assembly

Under the principle of unity of research and teaching, this interdisciplinary programme is supported by the Institute of Micro- and Nanotechnologies MacroNano® and its Centre of Micro- and Nanotechnologies. Students will be involved in research projects from an early stage. They have the opportunity to gain hands-on experience in the modern laboratory space (used as clean rooms in different classes) available in two technology buildings.

Programme structure

The programme is based on courses both in fundamental and engineering sciences. It aims to deepen skills and competencies acquired from undergraduate studies or practical work experience in the fields of semiconductor technology, microelectronics, microtechnologies and nanotechnologies.
During the first two semesters, the required theoretical background is taught. At this time, the students already have the opportunity to select certain specialisation courses in combination with elective soft skill courses. Students without German language knowledge are expected to take at least one German course. The third semester consists of a further specialisation subject and an advanced research project. Within the fourth semester, students work on the Master's project and thesis, which is defended in a colloquium.

Semester 1: Electronics Technology 1, Semiconductor Devices 1, Materials of Micro- and Nanotechnologies, Nanodiagnostics, Nanotechnology, Introduction to Project Work, Soft Skills

Semester 2: Microtechnologies 2, Lab Materials & Micro-/Nanofabrication, Introduction to Project Work, Soft Skills, Advanced Studies (personal choice of subjects related to the course outline)

Semester 3: Project with Seminar, Advanced Studies (personal choice of subjects related to the course outline), Technical Subject (choice from the entire Master's curriculum)

Semester 4: Master's thesis with colloquium

Mode of study

  • Fully on-site

Application and admission

Application period(s)

Academic admissions requirements

For admission to the Master of Science in Micro- and Nanotechnologies (MSc MNT), the successful completion of a Bachelor's or comparable course of at least six semesters or 180 credit points is required. The MSc MNT builds upon Bachelor's degrees in the following fields:

  • electrical, electronics and communications engineering
  • mechatronics
  • technical physics
  • material science
  • mechanical engineering

All of the above Bachelor's degree programmes must include an in-depth component in the following areas:

  • fundamentals of electrical engineering
  • electronics/microelectronics
  • analogue and digital electronics
  • semiconductor physics/technology
  • material science
  • physics, chemistry, and higher mathematics

Language requirements

Please check all requirements directly with the respective higher education institution. Exceptions may apply. See our website for further details.

German language requirements

German: None

English language requirements

English: C1

Accepted certificates include
Certificates Minimum result
TOEFL iBT Home Edition (before 2026)
Total: 95 / 120
Reading: 24 / 30
Listening: 22 / 30
Writing: 24 / 30
Speaking: 25 / 30
TOEFL iBT (since 2026)
Total: 5 / 6
Reading: 5 / 6
Listening: 5 / 6
Writing: 5 / 6
Speaking: 5 / 6
TOEIC
Total: 945 / 990
Reading: 455 / 495
Listening: 490 / 495
Writing: 180 / 200
Speaking: 180 / 200
PTE Academic
Total: 76 / 90
IELTS Academic
Total: 7 / 9
Cambridge English Qualifications
Total: C1 Advanced

How to apply?

Website

Please check this website.

Click here

Costs and funding

Tuition fees per semester

No tuition fees

Semester contribution

Approx. 320 EUR per semester (including a rail/bus ticket and reduced prices in the university canteen and cafeterias)

Cost of living

Approx. 860 EUR per month (including apartment rent)

Part-time employment

Temporary jobs are available at local enterprises. In some departments of TU Ilmenau, students are regularly employed as scientific assistants.

Scholarships and financing information

Living & services

Support for international students

  • Welcome event
  • Buddy programme
  • Tutors
  • Accompanying programme
  • Specialist counselling
  • Cultural and linguistic preparation
  • Visa matters
  • Help with finding accommodation
  • Support with registration procedures

TU Ilmenau's international student service, we4you, supports prospective and current students during the application and arrival process, everyday student life, and beyond. The we4you team provides advice, organises events and excursions, and helps our students feel comfortable in Ilmenau.

For online and on-site we4you support, please visit: https://www.tu-ilmenau.de/en/international/service/we4you-student-service.

Support for specific needs

Course-specific language courses available

German

Career advisory services

TU Ilmenau's we4you career counselling service provides assistance to international students, enabling an easier transition from the classroom to the working world.

Through individualised career counselling, workshops on CV writing, and interview practice, we give students the tools they need to succeed in today's job market. Opportunities for internships and part-time or graduate jobs are further promoted by our industry network and accessible job portal. Visits to local and nationwide job fairs are also on the agenda. These activities and events seek to equip students with the tools to confidently pursue their professional aspirations in the region surrounding the university, in Germany, and beyond.

For more information, please visit: https://www.tu-ilmenau.de/en/international/campus-international/we4you/boost-your-career.

Accommodation

Various student dormitories are available on campus. Rent for the residences ranges from 225 EUR – 417 EUR per room per month, depending on the type of accommodation. Advance registration is required via the Studierendenwerk Thüringen administrative office.

Information about the residences and the registration process can be found at: https://www.stw-thueringen.de/en/housing/.

Student applicants have a good chance of getting a room if the application for a room is submitted in good time, approx. three months before the start of the semester.

Of course, there is also the option to look for a privately rented apartment/room in Ilmenau or the surrounding area. For further information on privately rented accommodation, please contact TU Ilmenau's international student service, we4you, at: https://www.tu-ilmenau.de/en/international/service/we4you-student-service/team.

About us

Campus of the Technische Universität Ilmenau© Hajo Dietz

Technische Universität Ilmenau

Technische Universität Ilmenau is a state university with a strong research focus. Located in Central Germany, TU Ilmenau has had a long tradition in engineering and natural sciences since 1896, making it a sought-after destination for interdisciplinary research and education. With five faculties dedicated to delivering cutting-edge and sustainability-oriented programmes, the university offers 20 Bachelor's degree programmes, 27 Master's degree programmes, and doctoral education designed for real-world impact. Interested students can apply for a programme in the fields of engineering (e.g. Biomedical Engineering, Automotive Engineering, Mechanical Engineering), technology (e.g. Computer Science, Micro and Nanotechnologies, Renewable Energy Technology), mathematics (e.g. Business Mathematics), natural sciences (e.g. Biotechnical Chemistry, Technical Physics), or economic and social sciences (e.g. Media and Communication Science, International Business Economics). Eight of the university's Master's programmes are taught fully in English, and the large number of registered patents per staff provides just one example of the university’s many innovation activities. Students at Technische Universität Ilmenau enjoy a great supervision ratio, access to excellent facilities conducive to research-driven learning (including modern labs and makerspaces), and career counselling and events to support global professional connections. The international student service, we4you, assists students in integrating into the university’s vibrant campus community, which comprises over 100 nationalities. Through its extensive national and international partnership network and mobility options, Technische Universität Ilmenau fosters the expertise and personal development of its students and staff.

Location

Ilmenau is a vibrant hub of innovation and enterprise, where tradition intertwines with a strong focus on the future. The university town with its approximately 40,000 residents is situated in the centre of Germany in the federal state of Thuringia. Thuringia is known for its rich cultural heritage, with influential historic figures such as Goethe, Bach, and Luther having strong ties to the region. Thuringia offers stunning green landscapes, meandering rivers, and idyllic lakes, with the Thuringian Forest covering large areas of the state.

Ilmenau, located in the picturesque valley of the Ilm River and nestled in the northern foothills of the Thuringian forest, is more than a living monument to the past. Once renowned for its exquisite glass and porcelain craftsmanship, Ilmenau pulsates with a dynamic energy as a science and technology centre.

For TU Ilmenau students, this blend of heritage and innovation offers ample opportunities, such as forging connections with experienced and visionary mentors, fellow students, and pioneering companies. It allows them to immerse themselves in a realm where theoretical knowledge meets real-world application.

Ilmenau is well-connected by public transport and positioned at an equal distance (about two hours) from the major German cities of Berlin, Frankfurt, and Munich, as well as their international airports.

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Contact

Main contact

Department of Electrical Engineering and Information Technology

Name
Cornelia Scheibe
Address
98684 Ilmenau
Email
E-mail

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Always know what comes next

Study Guide gives you a personal to-do list tailored to your background, qualifications and interests, so you always know what to do next.