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Master's programme

Micro and Nano Systems Chemnitz University of Technology

Duration
4 semesters
Language of instruction
English
Tuition fees
No tuition fees
Next application deadline
15 July 2027 (winter semester)
Language level required
English: B2
German: A1

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Programme overview

Quick facts

Degree
MSc
Duration
4 semesters
Intake
Winter semester
Joint degree / double degree programme
No
A Diploma supplement will be issued
Yes
Combined Master's degree / PhD programme
No

Language of instruction

English

Courses are held in English (100%).

Programme description

This English-language Master's programme covers a wide range of subjects with a focus on future challenges in the fields of micro and nano systems.
The courses provide world-class, future-oriented education in design, manufacturing, characterisation and integration of miniaturised components into engineering systems. The interdisciplinary courses cover fundamental theoretical knowledge in physics and engineering but also application-oriented skills in developing innovative electronic and micro mechanic semiconductor components. Courses and practical training (labs) address current and prospective needs of industrial and academic research.

The programme is targeted at the following students:

  • Students with a BSc in Electrical Engineering and Information Technology earned at Chemnitz University of Technology
  • International and German students holding at least a Bachelor's degree in an equivalent academic field who wish to deepen and specialise their knowledge before entering industry or academia.

Programme structure

Compulsory (obligatory) subjects (50 credits):

  • Semiconductor Physics / Nanostructures (semester 2, lecture/seminar)
  • Design of Heterogeneous Systems (semester 2, lecture/seminar/lab)
  • Technologies for Micro and Nano Systems (semesters 1 & 2, lecture/seminar)
  • Advanced Integrated Circuit Technology (semester 2, lecture/seminar)
  • Microsystems Design (semester 1, lecture/seminar/lab)
  • Micro and Nano Devices (semester 1, lecture/seminar/lab)
  • Reliability of Micro and Nano Systems (semesters 1 & 2, lecture/seminar)
  • Materials in Micro and Nano Technologies (semester 1, lecture/seminar)
  • Smart Sensor Systems (semester 1, lecture/seminar/lab)

Elective (optional) subjects:
Students have to elect and pass subjects from the following catalogue in order to earn 20 credit points (CP):

  • Microscopy and Analysis on the Nano Scale (semester 2, lecture/seminar) – 5 CP
  • Surfaces, Thin Films and Interfaces (semester 3, lecture/seminar) – 5 CP
  • Optoelectronic Devices (semester 3, lecture) – 5 CP
  • Power Semiconductor Devices (semester 3, lecture/seminar) – 7 CP
  • Test of Digital and Mixed-Signal Circuits (semester 1, lecture/seminar) – 5CP
  • Fields and Waves (semester 2, lecture/seminar) – 5 CP
  • Next Generation Internet (semesters 1 & 2, lecture) – 5 CP
  • Advanced Mobile Networks (semesters 1 & 2, lecture/seminar) – 5 CP
  • Micro Optical Systems (semester 2, lecture/seminar) – 3 CP
  • Integrated Circuit Design – Transistor Level (semester 2, lecture/seminar/lab) – 5 CP
  • Numerical Methods for Materials and Reliability of Micro and Nano Systems (semester 2, lecture/seminar) – 5 CP
  • Failure Analytical Methods for Micro and Nano Systems (semester 3, lecture/seminar) – 5 CP
  • Flexible Electronics (semester 2, lecture/seminar) – 5 CP
  • Modern Battery Materials (semester 2, lecture/seminar) – 5 CP
  • Automotive Sensor Systems (semester 2, lecture/seminar) – 5 CP
  • Sensor Signal Evaluation Modern Battery Materials (semester 3, lecture/seminar) – 5 CP

Research project (obligatory, to be done at the university) – semester 3 – 20 CP

Master's thesis (obligatory, to be done at the university) – semester 4 – 30 CP

Mode of study

  • Fully on-site

Application and admission

Application period(s)

Winter semester

Applicants from Applications begin Application deadline
All countries
1 April 2027
15 July 2027
Information on application periods

Academic admissions requirements

  • Bachelor's degree in Electrical Engineering and Information Technology ("Bachelorstudiengang Elektrotechnik und Informationstechnik") received from Chemnitz University of Technology
  • Equivalent degree (decision by the board of examiners)

Language requirements

Please check all requirements directly with the respective higher education institution.

German language requirements

German: A1

Accepted certificates include
Certificates Minimum result
telc Deutsch
Total: telc Deutsch A1
ÖSD Zertifikat
Total: A1
Goethe-Zertifikat
Total: Goethe-Zertifikat A1

English language requirements

English: B2

Accepted certificates include
Certificates Minimum result
TOEIC
Total: 785 / 990
Reading: 385 / 495
Listening: 400 / 495
Writing: 150 / 200
Speaking: 160 / 200
TOEFL iBT (before 2026)
Total: 72 / 120
Reading: 18 / 30
Listening: 17 / 30
Writing: 17 / 30
Speaking: 20 / 30
telc English
Total: telc English B2
Cambridge English Qualifications Business (BEC)
Total: B2 Business Vantage
PTE Academic
Total: 59 / 90
Cambridge English Qualifications
Total: B2 First
UNIcert® English
Total: UNIcert® II
TOEFL iBT (since 2026)
Total: 4 / 6
Reading: 4 / 6
Listening: 4 / 6
Writing: 4 / 6
Speaking: 4 / 6
IELTS Academic
Total: 5.5 / 9

How to apply?

uni-assist

You can apply via uni-assist, the application processing service for international students.

Click here

Costs and funding

Tuition fees per semester

No tuition fees

Semester contribution

All students have to pay a semester contribution of approx. 340.50 EUR. This fee also covers the semester ticket, which permits you to use buses and trams in Chemnitz as well as regional trains throughout Germany during the semester. International students will receive the bank account details after admission with which they can transfer the semester contribution. However, the fee can also be paid after arrival in Chemnitz (by German bank card or transfer).

Cost of living

Approx. 970 EUR per month to cover personal expenses

Part-time employment

Students can find offers for part-time jobs, work placements, etc. on the job portal offered by the Career Service of Chemnitz University of Technology: https://www.tu-chemnitz.de/career-service/jobboerse/.

Scholarships and financing information

Incoming students can apply for different funding opportunities via the International Office of Chemnitz University of Technology. More information can be found at: https://www.tu-chemnitz.de/international/incoming/stipendien/index.php.en.

Living & services

Support for international students

  • Buddy programme

Career advisory services

The Career Service of Chemnitz University of Technology supports students during their studies as well as graduates entering their professional life. The Career Service provides a platform for companies and institutions to present themselves: https://www.tu-chemnitz.de/career-service/index.php.en.

Accommodation

The "Studentenwerk" Chemnitz-Zwickau runs several student residences. International students can apply for a single room in one of the residences. The prices depend on the size and furnishings of the room and vary between 270 EUR and 350 EUR: https://www.swcz.de/en/student-housing/our-halls-of-residence/.

Contact

Main contact

Faculty of Electrical Engineering and Information Technology

Name
Sven Quinger
Address
09107 Chemnitz
Email
E-mail

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Always know what comes next

Study Guide gives you a personal to-do list tailored to your background, qualifications and interests, so you always know what to do next.