Micro and Nano Systems Chemnitz University of Technology
- Duration
- 4 semesters
- Language of instruction
- English
- Tuition fees
- No tuition fees
- Next application deadline
- 15 July 2027 (winter semester)
- Language level required
- English: B2German: A1
Programme overview
Quick facts
- Degree
- MSc
- Duration
- 4 semesters
- Intake
- Winter semester
- Joint degree / double degree programme
- No
- A Diploma supplement will be issued
- Yes
- Combined Master's degree / PhD programme
- No
Language of instruction
Courses are held in English (100%).
Programme description
This English-language Master's programme covers a wide range of subjects with a focus on future challenges in the fields of micro and nano systems.
The courses provide world-class, future-oriented education in design, manufacturing, characterisation and integration of miniaturised components into engineering systems. The interdisciplinary courses cover fundamental theoretical knowledge in physics and engineering but also application-oriented skills in developing innovative electronic and micro mechanic semiconductor components. Courses and practical training (labs) address current and prospective needs of industrial and academic research.
The programme is targeted at the following students:
- Students with a BSc in Electrical Engineering and Information Technology earned at Chemnitz University of Technology
- International and German students holding at least a Bachelor's degree in an equivalent academic field who wish to deepen and specialise their knowledge before entering industry or academia.
Programme structure
Compulsory (obligatory) subjects (50 credits):
- Semiconductor Physics / Nanostructures (semester 2, lecture/seminar)
- Design of Heterogeneous Systems (semester 2, lecture/seminar/lab)
- Technologies for Micro and Nano Systems (semesters 1 & 2, lecture/seminar)
- Advanced Integrated Circuit Technology (semester 2, lecture/seminar)
- Microsystems Design (semester 1, lecture/seminar/lab)
- Micro and Nano Devices (semester 1, lecture/seminar/lab)
- Reliability of Micro and Nano Systems (semesters 1 & 2, lecture/seminar)
- Materials in Micro and Nano Technologies (semester 1, lecture/seminar)
- Smart Sensor Systems (semester 1, lecture/seminar/lab)
Elective (optional) subjects:
Students have to elect and pass subjects from the following catalogue in order to earn 20 credit points (CP):
- Microscopy and Analysis on the Nano Scale (semester 2, lecture/seminar) – 5 CP
- Surfaces, Thin Films and Interfaces (semester 3, lecture/seminar) – 5 CP
- Optoelectronic Devices (semester 3, lecture) – 5 CP
- Power Semiconductor Devices (semester 3, lecture/seminar) – 7 CP
- Test of Digital and Mixed-Signal Circuits (semester 1, lecture/seminar) – 5CP
- Fields and Waves (semester 2, lecture/seminar) – 5 CP
- Next Generation Internet (semesters 1 & 2, lecture) – 5 CP
- Advanced Mobile Networks (semesters 1 & 2, lecture/seminar) – 5 CP
- Micro Optical Systems (semester 2, lecture/seminar) – 3 CP
- Integrated Circuit Design – Transistor Level (semester 2, lecture/seminar/lab) – 5 CP
- Numerical Methods for Materials and Reliability of Micro and Nano Systems (semester 2, lecture/seminar) – 5 CP
- Failure Analytical Methods for Micro and Nano Systems (semester 3, lecture/seminar) – 5 CP
- Flexible Electronics (semester 2, lecture/seminar) – 5 CP
- Modern Battery Materials (semester 2, lecture/seminar) – 5 CP
- Automotive Sensor Systems (semester 2, lecture/seminar) – 5 CP
- Sensor Signal Evaluation Modern Battery Materials (semester 3, lecture/seminar) – 5 CP
Research project (obligatory, to be done at the university) – semester 3 – 20 CP
Master's thesis (obligatory, to be done at the university) – semester 4 – 30 CP
Mode of study
- Fully on-site
Application and admission
Application period(s)
Winter semester
| Applicants from | Applications begin | Application deadline | |
|---|---|---|---|
All countries
|
1 April 2027
|
15 July 2027
|
Academic admissions requirements
- Bachelor's degree in Electrical Engineering and Information Technology ("Bachelorstudiengang Elektrotechnik und Informationstechnik") received from Chemnitz University of Technology
- Equivalent degree (decision by the board of examiners)
Language requirements
German language requirements
Accepted certificates include
| Certificates | Minimum result |
|---|---|
telc Deutsch
|
Total: telc Deutsch A1
|
ÖSD Zertifikat
|
Total: A1
|
Goethe-Zertifikat
|
Total: Goethe-Zertifikat A1
|
English language requirements
Accepted certificates include
| Certificates | Minimum result |
|---|---|
TOEIC
|
Total: 785 / 990
Reading: 385 / 495
Listening: 400 / 495
Writing: 150 / 200
Speaking: 160 / 200
|
TOEFL iBT (before 2026)
|
Total: 72 / 120
Reading: 18 / 30
Listening: 17 / 30
Writing: 17 / 30
Speaking: 20 / 30
|
telc English
|
Total: telc English B2
|
Cambridge English Qualifications Business (BEC)
|
Total: B2 Business Vantage
|
PTE Academic
|
Total: 59 / 90
|
Cambridge English Qualifications
|
Total: B2 First
|
UNIcert® English
|
Total: UNIcert® II
|
TOEFL iBT (since 2026)
|
Total: 4 / 6
Reading: 4 / 6
Listening: 4 / 6
Writing: 4 / 6
Speaking: 4 / 6
|
IELTS Academic
|
Total: 5.5 / 9
|
How to apply?
uni-assist
You can apply via uni-assist, the application processing service for international students.
Click hereCosts and funding
Tuition fees per semester
No tuition fees
Semester contribution
All students have to pay a semester contribution of approx. 340.50 EUR. This fee also covers the semester ticket, which permits you to use buses and trams in Chemnitz as well as regional trains throughout Germany during the semester. International students will receive the bank account details after admission with which they can transfer the semester contribution. However, the fee can also be paid after arrival in Chemnitz (by German bank card or transfer).
Cost of living
Approx. 970 EUR per month to cover personal expenses
Part-time employment
Students can find offers for part-time jobs, work placements, etc. on the job portal offered by the Career Service of Chemnitz University of Technology: https://www.tu-chemnitz.de/career-service/jobboerse/.
Scholarships and financing information
Incoming students can apply for different funding opportunities via the International Office of Chemnitz University of Technology. More information can be found at: https://www.tu-chemnitz.de/international/incoming/stipendien/index.php.en.
Living & services
Support for international students
- Buddy programme
Career advisory services
The Career Service of Chemnitz University of Technology supports students during their studies as well as graduates entering their professional life. The Career Service provides a platform for companies and institutions to present themselves: https://www.tu-chemnitz.de/career-service/index.php.en.
Accommodation
The "Studentenwerk" Chemnitz-Zwickau runs several student residences. International students can apply for a single room in one of the residences. The prices depend on the size and furnishings of the room and vary between 270 EUR and 350 EUR: https://www.swcz.de/en/student-housing/our-halls-of-residence/.
Contact
Faculty of Electrical Engineering and Information Technology
- Name
- Sven Quinger
- Address
- 09107 Chemnitz
- Phone
- +49 37153124055