Master of Science in Microsystems Engineering University of Freiburg
- Duration
- 4 semesters
- Language of instruction
- English
- Tuition fees
- Tuition varies
- Next application deadline
- 15 July 2027 (winter semester)
- Language level required
- English: C1German: None
First impressions
Photo gallery
Our voices
After my Bachelor’s, I was curious about many fields and wanted a Master’s that would allow me to explore them. The MSE programme offered exactly that: the broad, interdisciplinary curriculum enabled me to gradually find the areas that interested me most. The professors were very supportive and gave students many opportunities to get involved in research. Through my student job and thesis, I discovered a passion for research, and now I am a PhD student at ETH Zurich.
Dan Wang
MSc Microsystems Engineering
Take a closer look
Master of Science in Microsystems Engineering
A tour around the University of Freiburg and its departments and facilities
Play videoProgramme overview
Quick facts
- Degree
- MSc
- Duration
- 4 semesters
- Full-time / part-time
- Full-time
- Intake
- Winter semester
- Joint degree / double degree programme
- No
- A Diploma supplement will be issued
- Yes
- Combined Master's degree / PhD programme
- No
Language of instruction
While a few elective courses (approx. five percent) are offered in German, the Master's programme can perfectly well be completed without any knowledge of German.
Programme description
Every day we use products that are smaller, smarter, more powerful and always connected. The hidden heroes behind these breakthroughs are microsystems – tiny, high‑performance devices that are now indispensable in automotive, medical, communications, energy and many more sectors. At the Department of Microsystems Engineering (IMTEK) you can become the engineer who designs them.
Why choose a career in Microsystem Engineering?
- Universal demand: Companies across all industries are hunting for microsystems experts.
- Cutting‑edge tech: Work with clean‑room facilities, wafer‑fab equipment and the latest MEMS/CMOS platforms.
- Broad expertise: Choose a specialisation that fits your passion – Circuits & Systems, Biomedical Engineering, Materials & Fabrication, or Photonics.
World‑class research hub: Study at one of the largest, internationally recognised microsystems centres.
Personalised mentorship: 220 students : 22 professors → This is an ideal student‑to‑faculty ratio.
Hands‑on experience: State‑of‑the‑art clean‑room & labs from day one
Industry‑ready thesis: Conduct real research in a professor’s group, using IMTEK’s cutting‑edge infrastructure.
Programme structure
The Master’s programme in Microsystems Engineering is built around a rigorous first year that establishes a solid theoretical foundation across all core disciplines. After completing this intensive core stage, students can tailor their studies through a wide selection of advanced electives and a dedicated concentration, culminating in a research‑driven Master’s thesis performed in one of our cutting‑edge labs.
Core modules (mandatory – five courses)
- Microelectronics
- Micromechanics
- Microsystems Design Lab
- MSE Technology & Processes
- Signal Processing
Choose five out of eight advanced electives
- Assembly & Packaging Technology
- Micro‑optics
- Modelling & System Identification
- Probability & Statistics
- Sensors
- Biomedical Microsystems
- Micro‑actuators
- Microfluidics
Tailor Your Path (Semesters two to four)
Choose one concentration area and gain access to a full suite of specialised lectures and hands‑on lab courses tailored to that field. This flexible structure lets you dive deep into the topics that matter most to your career goals.
- Circuits & Systems
- Biomedical Engineering
- Materials & Fabrication
- Photonics
Mode of study
- Fully on-site
International elements in the curriculum
The curriculum of this study programme includes international elements that support global perspectives and cross-cultural learning:
- Language training provided
- Training in intercultural skills
- Projects with partners in Germany and abroad
- International guest lecturers
- Specialist literature in other languages
Integrated internships
Internships are not mandatory in the curriculum, but students are free to take a leave of absence to complete a placement at a company.
Application and admission
Application period(s)
Winter semester
| Applicants from | Applications begin | Application deadline | |
|---|---|---|---|
EU countries
|
1 March 2027
|
15 July 2027
| |
Non-EU countries
|
1 March 2027
|
31 May 2027
|
Academic admissions requirements
We welcome graduates who have built a solid foundation in the core sciences and engineering fundamentals. Ideal candidates hold a Bachelor’s degree in:
- Mechatronics
- Mechanical Engineering
- Electrical Engineering
- Electronics and Communication
or any closely related discipline with an outstanding GPA / final grade.
A strong background in mathematics, physics, chemistry, mechanics, electronics, and materials science is required.
Language requirements
German language requirements
English language requirements
Accepted certificates include
| Certificates | Minimum result |
|---|---|
Cambridge English Qualifications
|
Total: C1 Advanced
|
PTE Academic
|
Total: 76 / 90
|
TOEFL iBT (since 2026)
|
Total: 5 / 6
Reading: 5 / 6
Listening: 5 / 6
Writing: 5 / 6
Speaking: 5 / 6
|
TOEFL iBT Home Edition (before 2026)
|
Total: 95 / 120
Reading: 24 / 30
Listening: 22 / 30
Writing: 24 / 30
Speaking: 25 / 30
|
TOEFL Essentials
|
Total: 10 / 12
Reading: 10 / 12
Listening: 10 / 12
Writing: 10 / 12
Speaking: 10 / 12
|
UNIcert® English
|
Total: UNIcert® III
|
How to apply?
Costs and funding
Tuition fees per semester
| Applicants from | Tuition fee | |
|---|---|---|
Non-EU countries
|
1,500 EUR
|
Semester contribution
190 EUR per semester:
- Administrative fee: 80 EUR
- Contribution to the constituted student body: 7 EUR
- Contribution to the student union: 103 EUR
Cost of living
Participants must ensure that sufficient funding is available to finance their participation in a course of study. The average cost of living in Freiburg for one month is currently approx. 850 EUR to 1,000 EUR.
Some details:
- Rooms in private accommodation, including extra costs: 350 EUR – 700 EUR
- Rooms in student residences, including extra costs: 250 EUR – 550 EUR
- Private expenses amount to around 350 EUR per month.
- Health insurance is available for approx. 120 EUR per month.
- Transport: A special student ticket for regional transport costs approx. 96 EUR per semester.
Part-time employment
Qualified students can secure research or teaching assistant positions within the Department of Microsystems Engineering (IMTEK) as well as at the many research institutes located in Freiburg.
Scholarships and financing information
Students who earned an excellent undergraduate record (a final grade of 1.5 or better on the German grading scale) are eligible to apply for the Deutschlandstipendium.
https://uni-freiburg.de/en/studies/during-your-studies/financing-your-studies/deutschlandstipendium/
Living & services
Support for international students
- Welcome event
- Buddy programme
- Tutors
- Accompanying programme
- Specialist counselling
- Cultural and linguistic preparation
Because a large proportion of our student body comes from abroad, we make it a priority that every international student feels welcomed and well prepared for life in Germany.
Pre arrival:
- Detailed checklists covering visas, health insurance, banking and travel arrangements
- Extensive guidelines on housing options, public transport, and everyday life in Freiburg
Arrival & orientation week
A comprehensive welcome week that includes information sessions on academic regulations and student services, campus tour to familiarise students with lecture halls, libraries and labs, social events organised by the Student Council
Ongoing support
Advice concerning visa extensions and residence permits, access to language courses and intercultural training, assistance with finding part time work, internships, and scholarship opportunities
Support for specific needs
Studying with a disability
The University of Freiburg offers a range of information and advisory services to enable its students with disabilities/chronic illnesses to participate in student life as equally and independently as possible and to support them in completing their studies. We are happy to advise you on support options during your studies, provide a listening ear, or mediate in the event of a conflict.
Studying with a family
The Studierendenwerk supports you in various ways during your studies with a child. We run our own daycare centres, offer family apartments in our residence halls, provide different counselling services, and our cafeterias have special children’s meals. You can find more information and the relevant contact persons: https://www.swfr.de/en/support/social-counselling/studying-with-a-child.
Course-specific language courses available
Career advisory services
The university offers the following career services:
- Company visits – on‑site tours and presentations at partner firms
- Employer talks & panels – direct conversations with recruiters and industry experts
- Application advice – personalised help with CVs, cover letters, and interview preparation
Accommodation
As Freiburg is an attractive city, finding a suitable and affordable place to live can take a little while. The University of Freiburg offers all newly enrolled international students the possibility to apply for student housing via the International Office. In addition to these dormitories, which are run by the Studierendenwerk Freiburg (www.swfr.de/en), several independent residence halls are listed on the university website (https://uni-freiburg.de/internationaloffice/housing/). The Studierendenwerk Freiburg and the International Office also offer a list of available private rooms.
About us
University of Freiburg
The University of Freiburg was founded in 1457 as a classical comprehensive university, making it one of the oldest institutions of higher education in Germany. Awarded for its excellence in both research and teaching, the university also boasts a long history, with numerous Nobel laureates. Brilliant scholars and creative thinking distinguish it today as a modern, top-notch university, well equipped for the challenges of the 21st century. As an organisation with around 24,500 students, 288 degree programmes, and 6,536 employees (2021), the University of Freiburg is committed to family friendliness, equal opportunities, and environmental consciousness in its day-to-day operations. The structure of the university is multifaceted, ranging from 11 academic faculties – from the humanities and the social and natural sciences all the way to engineering – to 19 research centres. This goes to show that we are a dynamic, large-scale institution with a diverse educational offering. As studies, research, and continuing education are all an integral part of this offering, we maintain a close relationship with the city and the region as well as with the international academic community. Bilateral partnerships, research projects, joint study courses and memberships in international networks such as the League of European Research Universities (LERU) and of EUCOR – The European Campus are examples of the university's strong transnational relations. All our students, including those from abroad, can take courses at the Universities of Basel (Switzerland) and Strasbourg (France) without having to enrol. Via EUCOR, The European Campus mobility grant, they also receive allowances for travel expenses to their partner institutions.
University facts
- 12thPlacement in the Times Higher Education World University Ranking 2026
- 75%of Microsystems Engineering graduates find a job within three months.
Location
Freiburg im Breisgau is a city in south-western Germany on the edge of the Black Forest. Freiburg was founded by Konrad and Duke Bertold III of Zähringen in 1120 as a free market town – hence its name, which translates to "free town". Freiburg holds a central position in Europe at the border triangle of Switzerland, France, and Germany, and is the city with the most hours of sunshine per year in Germany. It is nestled in one of the oldest cultural landscapes north of the Alps, a location which has had an unmistakable influence on the town. The university plays an essential part in the quality of life in Freiburg; both in the academic sphere and in the perception of the general public, the activities of the university are of central importance. Since its founding, teaching, learning and research have formed an indivisible whole.
With approx. 230,000 inhabitants, Freiburg has a friendly size, offering the safe surroundings of a smaller city whilst at the same time excelling in terms of culture, shopping and infrastructure. Both the inhabitants and the city government of Freiburg attach great importance to ecological values and sustainable development. This "green city" atmosphere influences many aspects of city life – from the numerous cyclists on the streets to cutting-edge solar energy research. Surrounded by the beautiful landscapes of the Black Forest and the wine-growing regions of the Rhine Valley, Freiburg is a popular destination for tourism and leisure activities.
Activate map
To activate the map, please click on the "Show map" button. Please note that after activation, data will be transmitted to OpenStreetMap. You can find more information about this in our privacy policy.
Contact
Faculty of Engineering Admissions Office
- Name
- Ursula Epe
- Adresse
- Georges-Köhler-Allee 101, 79110 Freiburg im Breisgau
- Telefon
- +49 7612038340